Probe speed very slow

At the beginning of your routine, (i prefer to place it before the loadprobe command) insert a "movespeed/100" command.

Mind you, there's an F5 Part/Machine checkbox that toggles your movement setting to be either a %of machine's max speed (that's a default setting, hence the 100 above), and absolute speed, which would be in millimeters per second. "Display absolute speeds"

IE if CMM 1's max speed parameters are 500mm/sec and you set it to 100% then moved the same routine to an older CMM with max movespeed of 240MM/Sec... Witth "Display absolute speed" toggled ON, both routines would run at 100mm/sec, and be more reproducible (albeit much slower).

Additionally, there's a parameter you can toggle for "Touchspeed" which again is either %max or absolute based on the F5 setting.  Typically a TP20 (or hexagon variant like you have) is set to 2%  changing your touchspeed can dramatically impact reproducibility, so be cautious about adjusting it.  I've found for most of my needs at my site (typically ±0.002" tightest tolerances), i can get away with about 8-10mm/sec max, which on newer machines with 500mm/sec max movespeed, is right in there at 2% of max.

This is happening now to