I just made a little calculation (on Excel) to see the effect of MPE p on the result of a cylinder.
I create a cylinder (Ø 60 H 10 ) with 2 levels of 8 hits, then I random each radius in a range ± 1 µm, create the cylinder axis and look at the defects on a point at (0,0,100) and (100,0,0).
I choose this range because it's tipically the MPE p of a good probe.
The centroid of the cylinder stay in a radius of 0.4 µm, the point at Z100 "moves" in a circle of 9 µm radius, and the point X100 "moves" along Z on 16 µm.
Those results come from a loop on 1000 constructions of LS cylinders.
Just a thought...
