Profile of surface

Looks like you need a plane with at least 4 points for datum A (6+ would be better) then a Circle for the diameter of datum B, and a line or plane for datum C.

When I do that, it says first and third plane axis are parallel and it won't let me get the measurement

Are you doing it like I mentioned in my post? They should not be parallel, but perpendicular. Are you using the face with the Recycle symbol for Datum A? It is showing the side of the part, but the datum triangle is pointing towards the face. Similar to how C is showing the other face of the part, but the Datum triangle is pointing to the "left" or away from the face, to the side of the part.

Yah I'm lost too... Those should be perpendicular. 
Post your code.

I did exactly as you told and with or without alignment it says they are parallel. 

STARTUP =ALIGNMENT/START,RECALL:USE_PART_SETUP,LIST=YES
ALIGNMENT/END
MODE/MANUAL
FLY/ON
FORMAT/TEXT,OPTIONS, ,HEADINGS,SYMBOLS, ;MEAS,NOM,DEV,TOL,OUTTOL, ,
LOADPROBE/ZVEZDA RAZLICITA
TIP/T1A0B0, SHANKIJK=0, 0, 1, ANGLE=0

PLN1 =FEAT/CONTACT/PLANE/DEFAULT,CARTESIAN,OUTLINE,LEAST_SQR
THEO/<176.5431,76.0469,-631.9672>,<0,0,1>
ACTL/<205.2684,66.9443,-642.2566>,<-0.0149829,-0.0185292,0.9997161>
TARG/<176.5431,76.0469,-631.9672>,<0,0,1>
ANGLE VEC=<0.9995163,0,-0.0311005>,SQUARE
SHOW FEATURE PARAMETERS=NO
SHOW CONTACT PARAMETERS=YES
NUMHITS=3,NUMROWS=3
SPACER=0
AVOIDANCE MOVE=BOTH,DISTANCE=10
USE BOUNDARY OFFSET=NO
SHOW HITS=NO

PLN2 =FEAT/CONTACT/PLANE/DEFAULT,CARTESIAN,OUTLINE,LEAST_SQR
THEO/<176.5431,76.0469,-631.9672>,<0,0,1>
ACTL/<253.7335,89.8507,-635.6324>,<0.9967371,-0.0200802,0.078179>
TARG/<176.5431,76.0469,-631.9672>,<0,0,1>
ANGLE VEC=<0.9995163,0,-0.0311005>,SQUARE
SHOW FEATURE PARAMETERS=NO
SHOW CONTACT PARAMETERS=YES
NUMHITS=3,NUMROWS=3
SPACER=0
AVOIDANCE MOVE=BOTH,DISTANCE=10
USE BOUNDARY OFFSET=NO
SHOW HITS=NO

CIR2 =FEAT/CONTACT/CIRCLE/DEFAULT,CARTESIAN,OUT,LEAST_SQR
THEO/<176.5431,76.0469,-631.9672>,<0,0,1>,50,6
ACTL/<214.4606,109.8673,-631.9672>,<0,0,1>,54.8891,6
TARG/<176.5431,76.0469,-631.9672>,<0,0,1>
START ANG=0,END ANG=360
ANGLE VEC=<0.9995163,0,-0.0311005>
DIRECTION=CCW
SHOW FEATURE PARAMETERS=NO
SHOW CONTACT PARAMETERS=YES
NUMHITS=10,DEPTH=5,PITCH=0
SAMPLE METHOD=SAMPLE_HITS
SAMPLE HITS=0,SPACER=0
AVOIDANCE MOVE=BOTH,DISTANCE=10
FIND HOLE=DISABLED,ONERROR=NO,READ POS=NO
SHOW HITS=NO

A1 =ALIGNMENT/START,RECALL:STARTUP,LIST=YES
ALIGNMENT/LEVEL,ZPLUS,PLN1
ALIGNMENT/TRANS,ZAXIS,PLN1
ALIGNMENT/TRANS,ZAXIS,PLN1
ALIGNMENT/ROTATE,XPLUS,TO,PLN2,ABOUT,ZPLUS
ALIGNMENT/TRANS,XAXIS,PLN2
ALIGNMENT/TRANS,XAXIS,CIR2
ALIGNMENT/TRANS,YAXIS,CIR2
ALIGNMENT/END

MODE/DCC
SCN1 =FEAT/SCAN,LINEAROPEN,NUMBER OF HITS=460,SHOW HITS=NO,SHOWALLPARAMS=YES
EXEC MODE=NORMAL, NOMS MODE=MASTER,CLEARPLANE=NO,SINGLE POINT=NO,THICKNESS=0
FINDNOMS=5,SELECTEDONLY=NO,USEBESTFIT=NO,PROBECOMP=NO,AVOIDANCE MOVE=NO,DISTANCE=0.1,CAD Compensation=NO,4-axis scan=NO
DIR1=LINE,INCR=0.3
HITTYPE=VECTOR
INITVEC=0.9809406,-0.1935739,0.0168709
DIRVEC=-0.843607,-0.5369611,-0.0001197
CUTVEC=0.0131582,-0.0204496,-0.9997043
ENDVEC=-0.9949033,-0.1002273,-0.0110448
PLANEVEC=0.0999718,-0.9947544,0.0216642
POINT1=252.6061,65.0968,-639.9733
POINT2=174.3097,71.8329,-639.9944
MEAS/SCAN
BASICSCAN/LINE,NUMBER OF HITS=460,SHOW HITS=NO,SHOWALLPARAMS=YES
<252.6061,65.0968,-639.9733>,<174.3097,71.8329,-639.9945>,CutVec=0.0131582,-0.0204496,-0.9997043,DirVec=-0.843607,-0.5369611,-0.0001197
InitVec=0.9809406,-0.1935739,0.0168709,EndVec=-0.9949032,-0.1002274,-0.0110448,THICKNESS=0
FILTER/DISTANCE,0.3
EXEC MODE=NORMAL
BOUNDARY/PLANE,<174.3097,71.8329,-639.9945>,PlaneVec=0.0999719,-0.9947544,0.0216642,Crossings=1
HITTYPE/VECTOR
NOMS MODE=MASTER
ENDSCAN

ENDMEAS/DATDEF/FEATURE=PLN1,A
DATDEF/FEATURE=CIR2,B
DATDEF/FEATURE=PLN2,C

your theo vectors of plane2 are wrong.

THEO/<176.5431,76.0469,-631.9672>,<0,0,1>
ACTL/<253.7335,89.8507,-635.6324>,<0.9967371,-0.0200802,0.078179>

What should I put there?

1,0,0

1,0,0

When I do it, it works but my dimension is 0.000

you should remeasure your datums after your manual alignment and make a new alignment with your dcc datums. you also need to scan the hole contour on several levels not just the one radius.

So do my datums manualy, make alignments than do them in dcc mode and do new alignments?

yes

Is there any other way to do this? 

I follow all your instructions, it looks good on paper, but measurements are just too much off. I don't get anywhere near 0.3. 

After your first DCC, did you do another round of DCC measurements? The first DCC alignment for me is finding all the features, then second DCC is fine tuning. See if this improves your measurements. Send your program in a reply inside of a code tag. Below the reply box, select Insert > Code. That way it's more readable

I would abandon your scan of datum B until you have your actual alignment locked down, there is no need to scan it for now. Seems like your current alignment is unstable and giving you pretty poor results. 

Not a single thing I tried has worked for me. I'm over my head with this. My scan, circle B, planes A,C look great in PCDMIS, but I'm having issues with alignment. Is there any other way to try aligning these surfaces? 

Plane A - vectors 0,0,1 

Circle B - vectors 0,0,1 

Plane C - vectors 1,0,0 

Scan - vectors 0,0,1 

Is this okay, or should it be changed? I get dimensions like 126, 204 and I use legacy dimensions, select profile surface, set datums on these surfaces and select the scan for measurement. 

Well... There are some things to try assuming you didn't get this fixed yet. 

Is your trihedron correctly aligned to your machine before you are starting the alignment?
Did you try it without using a scan? 
Is the part secure on the CMM, it's not sliding around, even slightly?
You can post your most recent attempt at measurement using the insert code function below. 

You should have something like this...

PLN_A      =FEAT/CONTACT/PLANE/DEFAULT,CARTESIAN,OUTLINE,LEAST_SQR
            THEO/<0,48,0>,<0,0,1>
            ACTL/<0,48,0>,<0,0,1>
            TARG/<0,48,0>,<0,0,1>
            ANGLE VEC=<0,1,0>,SQUARE
            SHOW FEATURE PARAMETERS=NO
            SHOW CONTACT PARAMETERS=NO
CYL_B      =FEAT/CONTACT/CYLINDER/DEFAULT,CARTESIAN,IN,LEAST_SQR
            THEO/<0,0,0>,<0,0,1>,54.6,15.5
            ACTL/<0,0,0>,<0,0,1>,54.6,15.5
            TARG/<0,0,0>,<0,0,1>
            START ANG=-45,END ANG=225
            ANGLE VEC=<1,0,0>
            DIRECTION=CCW
            SHOW FEATURE PARAMETERS=NO
            SHOW CONTACT PARAMETERS=NO
PLN_C      =FEAT/CONTACT/PLANE/DEFAULT,CARTESIAN,OUTLINE,LEAST_SQR
            THEO/<-40.15,22.6,-7.5>,<-1,0,0>
            ACTL/<-40.15,22.6,-7.5>,<-1,0,0>
            TARG/<-40.15,22.6,-7.5>,<-1,0,0>
            ANGLE VEC=<0,0,1>,SQUARE
            SHOW FEATURE PARAMETERS=NO
            SHOW CONTACT PARAMETERS=NO
A1         =ALIGNMENT/START,RECALL:STARTUP,LIST=YES
              ALIGNMENT/LEVEL,ZPLUS,PLN_A
              ALIGNMENT/ROTATE,XMINUS,TO,PLN_C,ABOUT,ZPLUS
              ALIGNMENT/TRANS,XAXIS,CYL_B
              ALIGNMENT/TRANS,YAXIS,CYL_B
              ALIGNMENT/TRANS,ZAXIS,PLN_A
            ALIGNMENT/END
            DATDEF/A,FEATURES=PLN_A,,
            DATDEF/B,FEATURES=CYL_B,,
            DATDEF/C,FEATURES=PLN_C,,
SCN1       =FEAT/SCAN,FREEFORM,NUMBER OF HITS=154,SHOW HITS=NO,SHOWALLPARAMS=NO
            MEAS/SCAN
              BASICSCAN/FREEFORM,NUMBER OF HITS=154,SHOW HITS=NO,SHOWALLPARAMS=NO
              ENDSCAN
            ENDMEAS/
SCN2       =FEAT/SCAN,FREEFORM,NUMBER OF HITS=154,SHOW HITS=NO,SHOWALLPARAMS=NO
            MEAS/SCAN
              BASICSCAN/FREEFORM,NUMBER OF HITS=154,SHOW HITS=NO,SHOWALLPARAMS=NO
              ENDSCAN
            ENDMEAS/
SCN3       =FEAT/SCAN,FREEFORM,NUMBER OF HITS=154,SHOW HITS=NO,SHOWALLPARAMS=NO
            MEAS/SCAN
              BASICSCAN/FREEFORM,NUMBER OF HITS=154,SHOW HITS=NO,SHOWALLPARAMS=NO
              ENDSCAN
            ENDMEAS/
SCN4       =FEAT/SET,CARTESIAN
            THEO/<-0.261,22.426,-7.5>,<0,0,1>
            ACTL/<-0.261,22.426,-7.5>,<0,0,1>
            CONSTR/SET,BASIC,SCN1,SCN2,SCN3,,
FCFPROF1 =SURFACE PROFILE : SCN4
            FEATCTRLFRAME/SHOWPARAMS=YES,SHOWEXPANDED=YES,
            CADGRAPH=OFF,REPORTGRAPH=OFF,TEXT=OFF,MULT=10.00,ARROWDENSITY=100,OUTPUT=BOTH,UNITS=MM,
            COMPOSITE=NO,
            CUSTOMIZED DRF=NO
            STANDARDTYPE=ASME_Y14_5
              PRIMARY DIMENSION/PROFILE OF SURFACE,0.3,<UZ>,<UTol>,A,B,C
              NOTE/FCFPROF1
            FEATURES/SCN4,,
DIM PROF4= PROFILE OF SURFACE OF SET SCN4    FORMANDLOCATION  UNITS=MM ,$
GRAPH=OFF  TEXT=OFF  MULT=10.00  ARROWDENSITY=100  OUTPUT=BOTH
AX    NOMINAL       +TOL       -TOL       MEAS        DEV     OUTTOL
M        0.000      0.150      0.150      0.000      0.000      0.000 ----|----

I've included both XactMeasure (feature control frame) and legacy profile of a surface - ideally, you should use XactMeasure.  XactMeasure will create it's ownm internal alignment from the datums whereas legacy uses the active alignment in your program.

This is what it looks like in PC-DMIS...