Most likely, the pause is due to the points being passes down to the controller (open the I++Server window and within the Cmm-Trace tab you will see the points being sent down.) One method to make it quicker is to thin out the density of the points (i.e. fewer points). There are many methods to thin out the density, one possible way is to use the command GENBSPTS. At the same time, 1000pt is really not very much. It should not pause that long (you did not state what type of CMM you are using). I suspect that you have many more than 1000pts.